一种基于疲劳损伤的MEMS金属薄膜电阻退化模型 陈传龙
陈传龙, 沈辉, 戴隆超, 陈玄奕, 张锦烨, 程家幸
A Fatigue Damage-Based Model for the Degradation of Resistance in MEMS Metal Films
CHEN Chuanlong, SHEN Hui, DAI Longchao, CHEN Xuanyi, ZHANG Jinye, CHENG Jiaxing
力学季刊
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2023, (4): 845
-853
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DOI: 10.15959/j.cnki.0254-0053.2023.04.008
