Design of Test Apparatus for Bending Micro-Structure and Test Specimens Made of Silicon

FENG Yong-ping, LUO Hua-yun

Chinese Quarterly of Mechanics ›› 2016, Vol. 37 ›› Issue (2) : 372-380.

Chinese Quarterly of Mechanics ›› 2016, Vol. 37 ›› Issue (2) : 372-380. DOI: 10.15959/j.cnki.0254-0053.2016.02.019

Design of Test Apparatus for Bending Micro-Structure and Test Specimens Made of Silicon

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 37(2): 372-380 https://doi.org/10.15959/j.cnki.0254-0053.2016.02.019

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