Electromigration Stress Analysis of Copper Interconnects Considering Strain Energy Density

LIU Qing, XU Kai-Yu

Chinese Quarterly of Mechanics ›› 2017, Vol. 38 ›› Issue (2) : 359-368.

Chinese Quarterly of Mechanics ›› 2017, Vol. 38 ›› Issue (2) : 359-368. DOI: 10.15959/j.cnki.0254-0053.2017.02.019

Electromigration Stress Analysis of Copper Interconnects Considering Strain Energy Density

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 38(2): 359-368 https://doi.org/10.15959/j.cnki.0254-0053.2017.02.019

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