A Fatigue Damage-Based Model for the Degradation of Resistance in MEMS Metal Films

CHEN Chuanlong, SHEN Hui, DAI Longchao, CHEN Xuanyi, ZHANG Jinye, CHENG Jiaxing

Chinese Quarterly of Mechanics ›› 2023, Vol. 44 ›› Issue (4) : 845-853.

Chinese Quarterly of Mechanics ›› 2023, Vol. 44 ›› Issue (4) : 845-853. DOI: 10.15959/j.cnki.0254-0053.2023.04.008

A Fatigue Damage-Based Model for the Degradation of Resistance in MEMS Metal Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 44(4): 845-853 https://doi.org/10.15959/j.cnki.0254-0053.2023.04.008

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